Axcelis Announces the Launch of the Company's New GSD Ovation ES Enabling Best-in-Class High Current Batch Implant Capability for Engineered Substrates
1. Axcelis launched the GSD Ovation™ ES high current ion implanter. 2. It targets engineered substrates and offers best-in-class performance. 3. The system enhances flexibility and capital efficiency in semiconductor manufacturing. 4. It is suitable for various substrate types, contributing to productivity improvements. 5. Axcelis has a 45-year history in innovative semiconductor solutions.